

Andrew B. Wittkower
Physicist and Semiconductor Industry Pioneer
Andrew B. Wittkower, a distinguished British-born Canadian-American physicist and pioneering entrepreneur in the semiconductor industry, passed away peacefully at his home in Rockport, Massachusetts, on March 14, 2026, at the age of 91. His remarkable career spanned decades, marked by significant contributions to scientific research and the advancement of semiconductor manufacturing technology. Wittkower's legacy is defined by his innovative spirit and his instrumental role in shaping modern electronics.
Born in London, England, on November 7, 1934, Andrew Benedict Wittkower's early life was profoundly influenced by his parents, Eric David Wittkower and Claire Francesca Weil, who had escaped from Germany two years prior to his birth. In 1951, his family, including his sister Sylvia, relocated to Montreal, Canada, where he would embark on his impressive academic journey. He cultivated a deep passion for science and mathematics from a young age, laying the groundwork for his future achievements.
Wittkower earned a first-class degree in mathematics and physics from McGill University, a testament to his intellectual prowess. Following this, he was accepted as a graduate student to the Cavendish Laboratory of Cambridge University. After exploring nuclear structure physics, he decided to pursue a different path and was granted a PhD in atomic collision physics from University College, a part of the University of London. This foundational academic training prepared him for a career at the forefront of scientific discovery.
His first professional endeavor began as a research scientist at High Voltage Engineering in Burlington, Massachusetts, from 1959 to 1970. During this period, Wittkower made substantial contributions to the field, publishing over 100 peer-reviewed papers in scientific, technical, and popular journals. His research focused on ion sources and charge-changing collisions in tandem particle accelerators, establishing his reputation as a prolific and insightful scientist.
Wittkower's entrepreneurial spirit led him to a second career spanning two decades, where he became a pivotal figure in the development of ion implantation equipment for the semiconductor industry. In 1970, he co-founded Extrion Corporation with Peter Rose, Roger Bastide, Eli Young, Bill Starks, and Geoffrey Ryding, a company that designed and built the first production ion implanter. This groundbreaking innovation revolutionized semiconductor manufacturing and continues to impact the industry today through Applied Materials/Varian, which now employs over 1500 people in the Cape Ann area. His influence in the semiconductor sector continued to grow as he co-founded Nova Associates, now known as Axcelis, along with Zymet, ASM Ion Implant, High Temperature Engineering, and Superior Design, all dedicated to manufacturing semiconductor equipment. In recognition of his profound impact and leadership, Wittkower was honored with the prestigious SEMMY Award by Semiconductor Equipment Manufacturers International in 1986.
Wittkower later embarked on a third career, focusing on the fabrication and promotion of a new semiconductor material, Silicon-on-Insulator (SOI). In 1986, he co-founded Ibis Technology, which became the first commercial manufacturer of this advanced material. His vision further materialized in 1992 when he founded Soitec USA, a subsidiary of Soitec SA. Under his leadership, Soitec USA grew to become the world's largest producer of SOI wafers, a position it maintains today. He served as President until 2005, subsequently becoming President Emeritus. In 2001, he was named a Life Fellow of the IEEE for his contributions and leadership in the development and advancement of ion implantation techniques, equipment, and companies. He was also recognized as a Life Fellow of the American Physical Society and the Institute of Physics (UK).
In his personal life, Andrew Wittkower met his beloved wife, Mary Shotter, a World War II codebreaker, on the ocean liner SS Saxonia in 1956. They married in August 1957 and emigrated to the USA in 1959, where they raised their son, David, and daughter, Elizabeth. Their marriage spanned more than 60 years until Mary's passing in 2020. After Mary's death, Andrew found companionship with Cheryl Mazer, with whom he enjoyed living in Rockport and traveling to Paris.
Andrew greatly enjoyed traveling, visiting Japan over 40 times for work and pleasure, and exploring destinations from the Arctic to the Antarctic with Mary and his children, including trips to Egypt and India. He also found joy in tending his vegetable garden, drinking scotch, and spending time with his children and grandchildren in a home filled with music and paintings. He chronicled incidents from his career in a memoir titled "Snippets from my Life as it Was," offering valuable insights into his journey.
Andrew B. Wittkower's passing marks the end of an era for the semiconductor industry and the scientific community. His relentless pursuit of knowledge, entrepreneurial spirit, and dedication to innovation have left an indelible mark on the world. He will be remembered as a brilliant physicist, a visionary leader, and a cherished family man.
Those who wish to honor Andrew's memory are invited to .
Memorial Trees
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